Atom probe compositional analysis of Co-Cr sputtered magnetic thin films

K. Hono, S. S. Babu, Y. Maeda, N. Hasegawa, Toshio Sakurai

    研究成果: Article査読

    26 被引用数 (Scopus)

    抄録

    A Co-22 at. % magnetic thin film, sputter deposited on a heated Cu coated Si substrate, was analyzed in the planar direction of the film by atom probe field ion microscopy (APFIM). The atom probe concentration depth profile convincingly showed that the film contained two phases, one enriched in Cr up to 30-35 at. % and the other enriched in Co up to 95-93 at. %. This result indicates that Co-22 at. % Cr thin film deposited on a heated substrate consists of ferromagnetic and paramagnetic phases, each less than a few tens of nanometers in size.

    本文言語English
    ページ(範囲)2504-2506
    ページ数3
    ジャーナルApplied Physics Letters
    62
    20
    DOI
    出版ステータスPublished - 1993 12 1

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)

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