Atmospheric plasma-calcination of mesoporous tungsten oxide utilizing plasma dielectric barrier discharge

P. Baroch; J. Hieda; N. Saito; O. Takai

doi:10.1016/j.tsf.2006.10.088

Atmospheric plasma-calcination of mesoporous tungsten oxide utilizing plasma dielectric barrier discharge

P. Baroch, J. Hieda, N. Saito, O. Takai

金属材料研究所

研究成果: Article › 査読

5 被引用数 (Scopus)

抄録

The fabrication of mesoporous tungsten oxide films by spin-coating method followed by an atmospheric plasma-calcination method is described and discussed here. For the calcination process the dielectric barrier discharge system generating homogenous atmospheric plasma discharge was designed and used. By this method, large surface area mesoporous films, with disordered pores of average diameter size of about 4 to 5 nm were synthesized. All the plasma-calcined films exhibit amorphous structure. The process of calcination was evaluated by FT-IR spectroscopy and in comparison with other methods a very high speed of calcination process was achieved.

本文言語	English
ページ（範囲）	4905-4908
ページ数	4
ジャーナル	Thin Solid Films
巻	515
号	12
DOI	https://doi.org/10.1016/j.tsf.2006.10.088
出版ステータス	Published - 2007 4 23

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

文献へのアクセス

10.1016/j.tsf.2006.10.088

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引用スタイル

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title = "Atmospheric plasma-calcination of mesoporous tungsten oxide utilizing plasma dielectric barrier discharge",

abstract = "The fabrication of mesoporous tungsten oxide films by spin-coating method followed by an atmospheric plasma-calcination method is described and discussed here. For the calcination process the dielectric barrier discharge system generating homogenous atmospheric plasma discharge was designed and used. By this method, large surface area mesoporous films, with disordered pores of average diameter size of about 4 to 5 nm were synthesized. All the plasma-calcined films exhibit amorphous structure. The process of calcination was evaluated by FT-IR spectroscopy and in comparison with other methods a very high speed of calcination process was achieved.",

keywords = "Dielectric barrier discharge, Mesoporous tungsten oxide, Plasma-calcination, Spin-coating",

author = "P. Baroch and J. Hieda and N. Saito and O. Takai",

note = "Funding Information: This work was supported in part by Nagoya Nano-Technology Cluster of Innovative Production System and the 21st Century COE Program “Nature-Guided Materials Processing” of the Ministry of Education, Culture, Sports, Science and Technology. One of the authors (P. Baroch) also gratefully thanks the Japan Society for Promotion of Science for providing the fellowship.",

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T1 - Atmospheric plasma-calcination of mesoporous tungsten oxide utilizing plasma dielectric barrier discharge

AU - Baroch, P.

AU - Hieda, J.

AU - Saito, N.

AU - Takai, O.

N1 - Funding Information: This work was supported in part by Nagoya Nano-Technology Cluster of Innovative Production System and the 21st Century COE Program “Nature-Guided Materials Processing” of the Ministry of Education, Culture, Sports, Science and Technology. One of the authors (P. Baroch) also gratefully thanks the Japan Society for Promotion of Science for providing the fellowship.

PY - 2007/4/23

Y1 - 2007/4/23

N2 - The fabrication of mesoporous tungsten oxide films by spin-coating method followed by an atmospheric plasma-calcination method is described and discussed here. For the calcination process the dielectric barrier discharge system generating homogenous atmospheric plasma discharge was designed and used. By this method, large surface area mesoporous films, with disordered pores of average diameter size of about 4 to 5 nm were synthesized. All the plasma-calcined films exhibit amorphous structure. The process of calcination was evaluated by FT-IR spectroscopy and in comparison with other methods a very high speed of calcination process was achieved.

AB - The fabrication of mesoporous tungsten oxide films by spin-coating method followed by an atmospheric plasma-calcination method is described and discussed here. For the calcination process the dielectric barrier discharge system generating homogenous atmospheric plasma discharge was designed and used. By this method, large surface area mesoporous films, with disordered pores of average diameter size of about 4 to 5 nm were synthesized. All the plasma-calcined films exhibit amorphous structure. The process of calcination was evaluated by FT-IR spectroscopy and in comparison with other methods a very high speed of calcination process was achieved.

KW - Dielectric barrier discharge

KW - Mesoporous tungsten oxide

KW - Plasma-calcination

KW - Spin-coating

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