Approximate Expression for Stress Distribution in Film Subjected to Indentation by Spherical Indenter (The Case of a Very Thin Film)

Hiroyuki Kagawa, Masahiro Ichikawa, Tohru Takamatsu, Hiroki Kuwano

研究成果: Article査読

9 被引用数 (Scopus)

抄録

In electronic devices, magnetic disks and micromechanical sysems, thin films coated on substrates are widely used. In order to develop a method for evaluation of their fracture strengths by means of indentation by a small spherical indenter, it is necessary to study the stress distribution in a film subjected to such indentation. In this paper, an approximate expression for the elastic stress distribution is derived for the case where the film thickness is much smaller than the radius of the contact area. A finite-element analysis is also carried out to examine the accuracy of the approximate expression.

本文言語English
ページ(範囲)416-420
ページ数5
ジャーナルTransactions of the Japan Society of Mechanical Engineers Series A
60
570
DOI
出版ステータスPublished - 1994
外部発表はい

ASJC Scopus subject areas

  • 材料科学(全般)
  • 材料力学
  • 機械工学

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