Application oriented micro-nano electro mechanical systems

Masayoshi Esashi

研究成果: Conference contribution

抄録

Sophisticated MEMS device used as a two-axis rotating gyroscope for navigation control system was developed. A silicon ring rotor is electrostatically levitated and rotated at 12,000rpm based on the principle of a variable capacitance motor. MEMS relay which uses a thermal bimetal actuator for making contact to multi-springs was developed for LSI tester. The springs have electrical connections to the backside using electrical feedthrough in a glass, which results in high frequency response up to 20 GHz and in high reliability owing to the hermetic sealing. Multi-probe data storage was developed. Electrical recording on a conductive polymer film and a ferroelectric film were performed. Electron field emitter array for non-contact multi-probe data storage and multi-column electron beam lithography was developed using carbon nano tube emitter and electrostatic lens for focusing. Micro molding for harsh environment as glass mold press was also developed.

本文言語English
ホスト出版物のタイトルCollection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications
出版社American Institute of Aeronautics and Astronautics Inc.
ページ251-255
ページ数5
ISBN(印刷版)1563477211, 9781563477218
DOI
出版ステータスPublished - 2004
イベントCollection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications - Monterey, CA, United States
継続期間: 2004 11 12004 11 5

出版物シリーズ

名前Collection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications

Other

OtherCollection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications
CountryUnited States
CityMonterey, CA
Period04/11/104/11/5

ASJC Scopus subject areas

  • Engineering(all)

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