Application of high aspect ratio scanning probe in microstructure measurement

M. M. Fu, K. K. Guo, Y. Chen, Y. H. Yang, B. F. Ju

研究成果: Conference contribution

抄録

An experiment, which is based on a self-developed pure tungsten high aspect ratio scanning probe, was conducted to measure the topography of a micro channel and a complex microstructure respectively. Comparison and analysis of both results by the tungsten probe and a single-crystal diamond probe were carried out. It indicates that the newly developed pure tungsten scanning probe has the capability in topography measurement, particularly fit for the high aspect ratio surface measurement.

本文言語English
ホスト出版物のタイトル8th CHINA-JAPAN International Conference on Ultra-Precision Machining, CJICUPM2008
ページ123-127
ページ数5
DOI
出版ステータスPublished - 2009
イベントCHINA-JAPAN International Conference on Ultra-Precision Machining, CJICUPM2008 - Changsha, China
継続期間: 2008 11月 242008 11月 25

出版物シリーズ

名前Advanced Materials Research
69-70
ISSN(印刷版)1022-6680

Other

OtherCHINA-JAPAN International Conference on Ultra-Precision Machining, CJICUPM2008
国/地域China
CityChangsha
Period08/11/2408/11/25

ASJC Scopus subject areas

  • 工学(全般)

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