Application of FIB with micro pick-up to microstructural study of irradiated SiC/SiC composites

Kazumi Ozawa, Sosuke Kondo, Hirotatsu Kishimoto, Akira Kohyama

研究成果: Review article査読

2 被引用数 (Scopus)

抄録

The combination of focused ion beam (FIB) micro-processing and the lift-out technique using the micro pick-up system was applied to the preparation of TEM specimens of irradiated SiC/SiC composites. The deformation caused by microstructural evolution was observed in the pyrolitic carbon interphase, and several helium bubbles and cavities were detected in the CVI matrix.

本文言語English
ページ(範囲)519-521
ページ数3
ジャーナルJournal of Electron Microscopy
53
5
DOI
出版ステータスPublished - 2004
外部発表はい

ASJC Scopus subject areas

  • Instrumentation

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