Antireflective coating using aluminum hydroxide formed by hydrothermal treatment of sputtered aluminum films

Takashi Ishiguro, Toshiyuki Hori, Zhiyong Qiu

研究成果: Article査読

18 被引用数 (Scopus)

抄録

Here we have proposed a simple method for forming antireflective coating. By putting a rf sputtered metallic Al film into boiling ultrapure water, the film becomes transparent. Its optical transmittance exceeds the glass substrate itself. In addition, the glass substrate with such coating on both sides shows almost perfect transmittance at specific wavelengths. By electron diffraction, the crystal structure of the transformed film is confirmed to be boehmite. The refractive index of the transparent film is estimated to be one of the median values of the glass and air.

本文言語English
論文番号023524
ジャーナルJournal of Applied Physics
106
2
DOI
出版ステータスPublished - 2009
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(全般)

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