Anatase phase stability and doping concentration dependent refractivity in codoped transparent conducting TiO2 films

T. L. Chen, Y. Furubayashi, Y. Hirose, T. Hitosugi, T. Shimada, T. Hasegawa

    研究成果: Article査読

    20 被引用数 (Scopus)

    抄録

    Nb0.06SnxTi0.94-xO2 (x ≤ 0.3) thin films were grown by a pulsed-laser deposition method with varying Sn concentration. Through a combinatorial technique, we find that Sn concentration can reach a maximum of about x ≤ 0.3 while maintaining the stable anatase phase and epitaxy. A doping concentration dependence of the refractivity is revealed, in which refractivity reduction at a wavelength of λ ≤ 500 nm is estimated to be 12.4% for Nb0.06Sn0.3 Ti 0.64O2 thin film. Sn doping induced band-gap blue shift can be contributed to the mixing of extended Sn 5s orbitals with the conduction band of TiO2. Low resistivity on the order of 10-4 Ω cm at room temperature and high internal transmittance of more than 95% in the visible light region are exhibited for Nb0.06Snx Ti 0.94-xO2 thin films (x ≤ 0.2). Optical and transport analyses demonstrate that doping Sn into Nb0.06 Ti 0.94O2 can reduce the refractivity while maintaining low resistivity and high transparency.

    本文言語English
    論文番号026
    ページ(範囲)5961-5964
    ページ数4
    ジャーナルJournal of Physics D: Applied Physics
    40
    19
    DOI
    出版ステータスPublished - 2007 10 7

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Acoustics and Ultrasonics
    • Surfaces, Coatings and Films

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