Analysis of voltage coefficient and leakage current of LA2O3 MIM capacitor

Akira Fukuyama, Kuniyuki Kakushima, Parhat Ahmet, A. N. Chandorkar, Kazuo Tsutsui, Nobuyuki Sugii, Takeo Hattori, Hiroshi Iwai

研究成果: Conference contribution

抄録

Pt/La 2O 3/Pt MIM (Metal-Insulator-Metal) capacitor was fabricated and its electrical characteristics were evaluated. Relation with voltage coefficients of the C-V curve (α and β) and 1/C and J was investigated. It was found that a has a strong correlation with 1/C, while β has no obvious correlation. Annealing temperature dependence of the leakage mechanism was studied. It was found that, under low electric field, the conduction is governed by Schottky, while, under high electric field, the conduction is Fowler-Nordheim (F-N) type. With high annealing temperature at 500°C, Poole-Frenkel (P-F) conduction appears between the Schottky and Fowler-Nordheim electric field regions.

本文言語English
ホスト出版物のタイトルProceedings of the 5th International Conference on Semiconductor Technology, ISTC 2006
ページ225-231
ページ数7
出版ステータスPublished - 2006
外部発表はい
イベント5th International Conference on Semiconductor Technology, ISTC 2006 - Shanghai, China
継続期間: 2006 3 212006 3 23

出版物シリーズ

名前Proceedings - Electrochemical Society
PV 2006-03

Other

Other5th International Conference on Semiconductor Technology, ISTC 2006
国/地域China
CityShanghai
Period06/3/2106/3/23

ASJC Scopus subject areas

  • 工学(全般)

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