Analysis of the inductance and the stray capacitance of the dry-etched micro inductors

M. Yamaguchi, M. Matsumoto, H. Ohzeki, K. I. Arai

研究成果: Article査読

34 被引用数 (Scopus)

抄録

Thin film inductors with meander coil or spiral coil were examined systematically. The minimum line spacing of the Inductors was 1.5um. In case of air core Inductors, both inductance and stray capacitance are calculated from the dimension of the inductors and they agreed very well with measured ones. With the application of magnetic thin film, the inductance is increased and the degree of increase was proportional to the length of the coil. It is found that the capacitance between conductor and magnetic film is very significant and needs special consideration.

本文言語English
ページ(範囲)5274-5276
ページ数3
ジャーナルIEEE Transactions on Magnetics
27
6
DOI
出版ステータスPublished - 1991 11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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