Analysis of subsurface imaging and effect of contact elasticity in the ultrasonic force microscope

Kazushi Yamanaka, Hisato Ogiso, Oleg Kolosov

研究成果: Article査読

70 被引用数 (Scopus)

抄録

We examined, both theoretically and experimentally, the characteristics of subsurface imaging with nanometer resolution and the effect of contact elasticity in the ultrasonic force microscope (UFM). In particular, the effect of the surface energy and effective elasticity on the maximum tip-sample force and the shift of the averaged tip-sample distance were examined. Furthermore, kink formation in the cantilever deflection (za) against the ultrasonic frequency vibration (UFV) amplitude (a) characteristics was predicted. This model was used to explain experimental observations in UFM, such as the features of the measured za a) curve and the damping of the cantilever torsion vibration by the UFV. Moreover the previously reported lateral ultrasonic force microscope image of subsurface features was explained by the response of subsurface edge dislocation to a large instantaneous force enhanced by the UFV.

本文言語English
ページ(範囲)3197-3203
ページ数7
ジャーナルJapanese journal of applied physics
33
5S
DOI
出版ステータスPublished - 1994 5月
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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