An XYθZ planar motion stage system driven by a surface motor for precision positioning

研究成果: Chapter

1 被引用数 (Scopus)

抄録

This chapter describes a surface motor-driven XYθZ stage system. The surface motor consists of two pairs of linear motors. The magnetic arrays are mounted on the moving element (platen) and the stator windings of the linear motors on the stage base. The platen can be moved in the X and Y directions by the X-linear motors and the Y-linear motors, respectively. It can also be rotated about the Z-axis by a moment generated by the X-or Y-linear motors. In the controller of the stage, a decoupled controlling element is employed to reduce the interference errors between the in-plane motions. A cascaded notch compensator is applied for dealing with the stage resonance. A disturbance observer is implemented to estimate and eliminate the influence of disturbance forces. A surface encoder is also developed to replace the conventional laser interferometers for XYθZ motion measurement.

本文言語English
ホスト出版物のタイトルSmart Devices and Machines for Advanced Manufacturing
出版社Springer London
ページ257-281
ページ数25
ISBN(印刷版)9781848001466
DOI
出版ステータスPublished - 2008 12月 1

ASJC Scopus subject areas

  • 工学(全般)

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