An SOI 3-axis accelerometer with a zigzag-shaped Z-electrode for differential detection

M. Fujiyoshi; Y. Nonomura; H. Funabashi; Y. Omura; T. Akashi; Y. Hata; H. Yamada; Masayoshi Esashi

doi:10.1109/TRANSDUCERS.2011.5969156

An SOI 3-axis accelerometer with a zigzag-shaped Z-electrode for differential detection

M. Fujiyoshi, Y. Nonomura, H. Funabashi, Y. Omura, T. Akashi, Y. Hata, H. Yamada, Masayoshi Esashi

マイクロシステム融合研究開発センター

研究成果: Conference contribution

14 被引用数 (Scopus)

抄録

We have developed a fully-differential 3-axis accelerometer with a novel zigzag-shaped Z-electrode, which is used for motion controls of automobiles and robots.

本文言語	English
ホスト出版物のタイトル	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
ページ	1010-1013
ページ数	4
DOI	https://doi.org/10.1109/TRANSDUCERS.2011.5969156
出版ステータス	Published - 2011 9月 1
イベント	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China 継続期間: 2011 6月 5 → 2011 6月 9

出版物シリーズ

名前	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
国/地域	China
City	Beijing
Period	11/6/5 → 11/6/9

ASJC Scopus subject areas

ハードウェアとアーキテクチャ
電子工学および電気工学

文献へのアクセス

10.1109/TRANSDUCERS.2011.5969156

他のファイルとリンク

引用スタイル

Fujiyoshi, M., Nonomura, Y., Funabashi, H., Omura, Y., Akashi, T., Hata, Y., Yamada, H., & Esashi, M. (2011). An SOI 3-axis accelerometer with a zigzag-shaped Z-electrode for differential detection. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1010-1013). [5969156] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969156

An SOI 3-axis accelerometer with a zigzag-shaped Z-electrode for differential detection. / Fujiyoshi, M.; Nonomura, Y.; Funabashi, H. その他.

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1010-1013 5969156 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

研究成果: Conference contribution

Fujiyoshi, M, Nonomura, Y, Funabashi, H, Omura, Y, Akashi, T, Hata, Y, Yamada, H & Esashi, M 2011, An SOI 3-axis accelerometer with a zigzag-shaped Z-electrode for differential detection. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969156, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 1010-1013, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 11/6/5. https://doi.org/10.1109/TRANSDUCERS.2011.5969156

Fujiyoshi M, Nonomura Y, Funabashi H, Omura Y, Akashi T, Hata Y その他. An SOI 3-axis accelerometer with a zigzag-shaped Z-electrode for differential detection. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1010-1013. 5969156. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969156

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abstract = "We have developed a fully-differential 3-axis accelerometer with a novel zigzag-shaped Z-electrode, which is used for motion controls of automobiles and robots.",

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An SOI 3-axis accelerometer with a zigzag-shaped Z-electrode for differential detection

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