An autocollimator with a mid-infrared laser for angular measurement of rough surfaces

Hiraku Matsukuma, Yun Asumi, Masashi Nagaoka, Yuki Shimizu, Wei Gao

研究成果: Article査読

4 被引用数 (Scopus)

抄録

In this study, we proposed an autocollimator for the angular measurement of rough surfaces. A mid-infrared laser having a wavelength of 2.8 μm was employed as the light source because it possesses high specular reflectivity on rough surfaces. Although a conventional autocollimator using a visible laser has a high resolution of angular measurement, it can only be used to measure mirror surfaces because the intensity distribution of the reflected light from a rough surface changes significantly due to the influence of diffused reflection. The suitability of a mid-infrared laser in an autocollimator for the angular measurement of rough surfaces (sub-micrometer level) was verified through simulations using reflection models. Therefore, a continuous-wave mode fluoride glass fiber based mid-infrared laser was developed for the autocollimator. Furthermore, an autocollimation unit was designed and constructed for detecting the angular displacement of mid-infrared laser light reflected from a target surface. The capability of the developed autocollimator for the angular measurement of rough surfaces was demonstrated through experiments.

本文言語English
ページ(範囲)89-99
ページ数11
ジャーナルPrecision Engineering
67
DOI
出版ステータスPublished - 2021 1

ASJC Scopus subject areas

  • 工学(全般)

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