An air-bearing displacement sensor with a micro-ball stylus for profile measurement of 3D micro-structured surfaces

Y. Yoshikawa, A. Shibuya, W. Gao

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

Micro-structured surfaces such as micro-aspheric lenses/lens arrays and micro-gears are getting increasingly important in industries. A lot of micro-structured surfaces have complicated three-dimensional (3D) profiles with short pitches and large amplitudes (high-aspect-ratio). Some of them also have steep surface slopes. It is difficult, however, to use conventional measuring instruments to measure profiles of such 3D micro-structured surfaces. This paper describes a contacttype displacement sensor for profile measurement of 3D microstructured surfaces. The shaft of the sensor is levitated by airbearings to reduce the contact force between the sensor and the measured surface. A sharp corn stylus is attached at the end of the sensor shaft. A precision glass micro-ball is glued on the top of the stylus shaft. The diameter of micro-ball is under 50 μm. The displacement sensor is also used to measure the profile of a micro gear with a high-aspect-ratio surface profile.

本文言語English
ホスト出版物のタイトルProceedings of the 35th International MATADOR 2007 Conference
ページ249-252
ページ数4
出版ステータスPublished - 2007 12 1
イベント35th International MATADOR 2007 Conference - Taipei, Taiwan, Province of China
継続期間: 2007 7 12007 7 1

出版物シリーズ

名前Proceedings of the 35th International MATADOR 2007 Conference

Other

Other35th International MATADOR 2007 Conference
国/地域Taiwan, Province of China
CityTaipei
Period07/7/107/7/1

ASJC Scopus subject areas

  • 材料力学

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