In order to diagnose the EMI (Electromagnetic Interference) problem of ICs, an integrated active magnetic probe array has been developed in SOI (Silicon On Insulator)-CMOS technology. Three aligned differential coils, differential amplifiers, a differential to single-ended converter, an output buffer and bias circuits are all integrated in a single-chip. A measurement result shows that the probe achieves an e-field suppression ratio of 33.6 dB at 50 MHz. Furthermore, a two-dimensional magnetic field distribution map is drawn by the probe array using the 3-point concurrent measurement. The obtained image gains three times higher resolution than that of a single scan under an identical condition.
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