An absolute surface encoder for measurement of absolute in-plane position with a mode-locked femtosecond laser and a planar scale grating having variable periods along the two orthogonal directions is proposed. In the proposed method, the absolute in-plane position is measured through observing the spectra of the coupled groups of the positive and negative first-order diffracted mode-locked femtosecond laser emanated from a single point on the planar scale grating. Due to the dispersive effect of the planar scale grating having variable periods, each of the diffracted modes has a unique angle of diffraction associated with the absolute position information. Therefore, the absolute in-plane position can be detected by obtaining the peak frequencies in the optical spectra of the coupled positive and negative first-order diffracted beams received by dual detector units. The dual-detector configuration of the optical head also contributes to improving the robustness of the absolute position measurement against the angular error motion of the planar scale grating. Furthermore, interference signals capable of being used for the improvement of the absolute position measurement can be generated under the dual detector configuration. Results of the numerical calculations for the theoretical verification of the proposed method, fabrication of a scale grating having a variable period (VLS grating) with interference lithography, design and development of the optical head, as well as the results of basic experiments by using the developed optical head and the VLS grating, are reported.
|出版ステータス||Published - 2021 1|
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