We propose a simple fabrication method for self-aligned top contacts for an organic thin film transistor (TFT) that can be miniaturized. The self-aligned top electrodes are formed without any break in the vacuum condition after the formation of an organic channel on the substrate with a prefabricated insulating structure. As a demonstration of this method, pentacene TFTs with submicron-length channels have been fabricated and successfully operated. Scanning electron microscopy of TFTs reveals well-defined TFT structures as expected.
|ジャーナル||Japanese Journal of Applied Physics, Part 2: Letters|
|出版物ステータス||Published - 2005|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)