Alignment-free top-contact formation for organic thin film transistors with submicron-length channel

Iwao Yagi, Kunji Shigeto, Kazuhito Tsukagoshi, Yoshinobu Aoyagi

研究成果: Article

7 引用 (Scopus)

抜粋

We propose a simple fabrication method for self-aligned top contacts for an organic thin film transistor (TFT) that can be miniaturized. The self-aligned top electrodes are formed without any break in the vacuum condition after the formation of an organic channel on the substrate with a prefabricated insulating structure. As a demonstration of this method, pentacene TFTs with submicron-length channels have been fabricated and successfully operated. Scanning electron microscopy of TFTs reveals well-defined TFT structures as expected.

元の言語English
ページ(範囲)L479-L481
ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
44
発行部数16-19
DOI
出版物ステータスPublished - 2005

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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