Adsorption of Carbonaceous Gases on Si Surfaces

Tsuyoshi Takaoka, Isao Kusunoki

研究成果: Article査読

本文言語English
ページ(範囲)981-991
ページ数11
ジャーナルShinku/Journal of the Vacuum Society of Japan
41
12
DOI
出版ステータスPublished - 1998 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

引用スタイル