Acoustically Levitated Spinning Optical Scanner

Takashi Sasaki, Kazuhiro Hane

研究成果: Conference contribution

抄録

A novel concept for obtaining a wide-angle two-dimensional scanner using the acoustic levitating method is proposed. A lightweight and high-surface quality silicon mirror is fabricated by micromachining and it is attached vertically on the 3 mm diameter polymer disc with a ferromagnetic rod for fabricating a mirror rotor. The size of the mirror is about 1 mm and the weight of the mirror rotor is 800 ug. The levitating and 360 degrees rotation of the fabricated mirror rotor is demonstrated by placing the mirror rotor in the standing acoustic field and rotating magnetic field, successfully. In addition, the tilting of the rotational axis of the fabricated mirror rotor during the rotation for creating the two-dimensional laser scanning is also demonstrated by this proposed concept, successfully.

本文言語English
ホスト出版物のタイトル21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
出版社Institute of Electrical and Electronics Engineers Inc.
ページ439-442
ページ数4
ISBN(電子版)9781665412674
DOI
出版ステータスPublished - 2021 6 20
イベント21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States
継続期間: 2021 6 202021 6 25

出版物シリーズ

名前21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
国/地域United States
CityVirtual, Online
Period21/6/2021/6/25

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 機械工学
  • 制御と最適化
  • 器械工学

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