Acoustic interference suppression of quartz crystal microbalance sensor arrays utilizing phononic crystals

Yung Yu Chen, Li Chung Huang, Wei Shan Wang, Yu Ching Lin, Tsung Tsong Wu, Jia Hong Sun, Masayoshi Esashi

研究成果: Article査読

12 被引用数 (Scopus)

抄録

Acoustic interference suppression of quartz crystal microbalance (QCM) sensor arrays utilizing phononic crystals is investigated in this paper. A square-lattice phononic crystal structure is designed to have a complete band gap covering the QCMs resonance frequency. The monolithic sensor array consisting of two QCMs separated by phononic crystals is fabricated by micromachining processes. As a result, 12 rows of phononic crystals with band gap boost insertion loss between the two QCMs by 20 dB and also reduce spurious modes. Accordingly, the phononic crystal is verified to be capable of suppressing the acoustic interference between adjacent QCMs in a sensor array.

本文言語English
論文番号153514
ジャーナルApplied Physics Letters
102
15
DOI
出版ステータスPublished - 2013 4月 15

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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