Acoustic interference suppression of quartz crystal microbalance sensor arrays utilizing phononic crystals

Yung Yu Chen; Li Chung Huang; Wei Shan Wang; Yu Ching Lin; Tsung Tsong Wu; Jia Hong Sun; Masayoshi Esashi

doi:10.1063/1.4802781

Acoustic interference suppression of quartz crystal microbalance sensor arrays utilizing phononic crystals

Yung Yu Chen, Li Chung Huang, Wei Shan Wang, Yu Ching Lin, Tsung Tsong Wu, Jia Hong Sun, Masayoshi Esashi

マイクロシステム融合研究開発センター

研究成果: Article › 査読

12 被引用数 (Scopus)

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Acoustic interference suppression of quartz crystal microbalance (QCM) sensor arrays utilizing phononic crystals is investigated in this paper. A square-lattice phononic crystal structure is designed to have a complete band gap covering the QCMs resonance frequency. The monolithic sensor array consisting of two QCMs separated by phononic crystals is fabricated by micromachining processes. As a result, 12 rows of phononic crystals with band gap boost insertion loss between the two QCMs by 20 dB and also reduce spurious modes. Accordingly, the phononic crystal is verified to be capable of suppressing the acoustic interference between adjacent QCMs in a sensor array.

本文言語	English
論文番号	153514
ジャーナル	Applied Physics Letters
巻	102
号	15
DOI	https://doi.org/10.1063/1.4802781
出版ステータス	Published - 2013 4月 15

ASJC Scopus subject areas

物理学および天文学（その他）

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10.1063/1.4802781

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title = "Acoustic interference suppression of quartz crystal microbalance sensor arrays utilizing phononic crystals",

abstract = "Acoustic interference suppression of quartz crystal microbalance (QCM) sensor arrays utilizing phononic crystals is investigated in this paper. A square-lattice phononic crystal structure is designed to have a complete band gap covering the QCMs resonance frequency. The monolithic sensor array consisting of two QCMs separated by phononic crystals is fabricated by micromachining processes. As a result, 12 rows of phononic crystals with band gap boost insertion loss between the two QCMs by 20 dB and also reduce spurious modes. Accordingly, the phononic crystal is verified to be capable of suppressing the acoustic interference between adjacent QCMs in a sensor array.",

author = "Chen, {Yung Yu} and Huang, {Li Chung} and Wang, {Wei Shan} and Lin, {Yu Ching} and Wu, {Tsung Tsong} and Sun, {Jia Hong} and Masayoshi Esashi",

note = "Funding Information: The authors gratefully acknowledge financial support from the National Science Council of ROC through Grant NSC 97-2221-E-036-020-MY3.",

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AU - Chen, Yung Yu

AU - Huang, Li Chung

AU - Wang, Wei Shan

AU - Lin, Yu Ching

AU - Wu, Tsung Tsong

AU - Sun, Jia Hong

AU - Esashi, Masayoshi

N1 - Funding Information: The authors gratefully acknowledge financial support from the National Science Council of ROC through Grant NSC 97-2221-E-036-020-MY3.

PY - 2013/4/15

Y1 - 2013/4/15

N2 - Acoustic interference suppression of quartz crystal microbalance (QCM) sensor arrays utilizing phononic crystals is investigated in this paper. A square-lattice phononic crystal structure is designed to have a complete band gap covering the QCMs resonance frequency. The monolithic sensor array consisting of two QCMs separated by phononic crystals is fabricated by micromachining processes. As a result, 12 rows of phononic crystals with band gap boost insertion loss between the two QCMs by 20 dB and also reduce spurious modes. Accordingly, the phononic crystal is verified to be capable of suppressing the acoustic interference between adjacent QCMs in a sensor array.

AB - Acoustic interference suppression of quartz crystal microbalance (QCM) sensor arrays utilizing phononic crystals is investigated in this paper. A square-lattice phononic crystal structure is designed to have a complete band gap covering the QCMs resonance frequency. The monolithic sensor array consisting of two QCMs separated by phononic crystals is fabricated by micromachining processes. As a result, 12 rows of phononic crystals with band gap boost insertion loss between the two QCMs by 20 dB and also reduce spurious modes. Accordingly, the phononic crystal is verified to be capable of suppressing the acoustic interference between adjacent QCMs in a sensor array.

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Acoustic interference suppression of quartz crystal microbalance sensor arrays utilizing phononic crystals

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