Acceleration of deposition rates in a chemical vapor deposition process by laser irradiation

Hidetoshi Miyazaki, Teiichi Kimura, Takashi Goto

研究成果: Letter査読

28 被引用数 (Scopus)

抄録

Yttria-stabilized zirconia (YSZ) films were prepared by a laser Chemical vapor deposition (CVD) process. A plasma-like strong light emission was observed from a reaction zone around a substrate by laser irradiation. The deposition rates were significantly increased from 1 to 230 μm/h. The charges in the light-emitting zone consisted of mainly positive and negative ions, but electrons scarcely existed. The emitted light had a continuous spectrum similar to the Planck distribution.

本文言語English
ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
42
3 B
出版ステータスPublished - 2003 3 15

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(その他)
  • 物理学および天文学(全般)

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