Academic approach to new industry-relevant MEMS

研究成果: Conference contribution

抄録

The paper introduces recent collaboration between Tohoku University and industry in MEMS (micro electro mechanical systems) field. The selected examples of devices are an integrated network tactile sensor for robot applications, a tunable SAW (surface acoustic wave) filter for TV white space cognitive WiFi communication and an anodically-bondable LTCC (low temperature cofired ceramic) wafer for wafer-level hermetic MEMS packaging. In the last part of this paper, multi-leveled shared MEMS facilities available for industrial collaboration are summarized. The most important message here is that we are strongly motivated to contribute to industry in multiple manners.

本文言語English
ホスト出版物のタイトルChina Semiconductor Technology International Conference 2015, CSTIC 2015
編集者Cor Claeys, Qinghuang Lin, David Huang, Hanming Wu, Ru Huang, Kafei Lai, Ying Zhang, Beichao Zhang, Kuochun Wu, Larry Chen, Steve Liang, Peilin Song, Hsiang-Lan Lung, Dong Chen, Qi Wang
出版社Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)9781479972418
DOI
出版ステータスPublished - 2015 7 8
イベント2015 China Semiconductor Technology International Conference, CSTIC 2015 - Shanghai, China
継続期間: 2015 3 152015 3 16

出版物シリーズ

名前China Semiconductor Technology International Conference 2015, CSTIC 2015

Other

Other2015 China Semiconductor Technology International Conference, CSTIC 2015
国/地域China
CityShanghai
Period15/3/1515/3/16

ASJC Scopus subject areas

  • 電子工学および電気工学

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