A varifocal micromirror with pure parabolic surface using bending moment drive

Ryohei Hokari, Kazuhiro Hane

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

We propose a method to generate a pure parabolic surface of varifocal micromirror by applying a bending moment to the circumference of the micromirror. Pure paraboloid can focus light without aberration as one of the ideal mirror surfaces. In the conventional method, varifocal mirror generates an approximate spherical surface or a paraboloid-like surface by applying a distributed load to the central part of the mirror with parallel plate electrodes. In this study, the micromirror is deformed only by applying a bending moment to the circumference of the mirror in order to generate an ideal paraiboloid. The proposed mirror was fabricated from SOI wafer. The deviation of the varifocal mirror from the ideal parabolid was measured to smallar than 5nm for the 400μm diameter mirror with the focal lengths from the infinity to 24mm at the voltages from 0 to 215V.

本文言語English
ホスト出版物のタイトル2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
ページ92-93
ページ数2
DOI
出版ステータスPublished - 2008 10月 23
イベント2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS - Freiburg, Germany
継続期間: 2008 8月 112008 8月 14

出版物シリーズ

名前2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

Other

Other2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
国/地域Germany
CityFreiburg
Period08/8/1108/8/14

ASJC Scopus subject areas

  • 電子工学および電気工学

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