@inproceedings{0d94145fd0014318b3f65991ff4c313a,
title = "A varifocal micromirror with pure parabolic surface using bending moment drive",
abstract = "We propose a method to generate a pure parabolic surface of varifocal micromirror by applying a bending moment to the circumference of the micromirror. Pure paraboloid can focus light without aberration as one of the ideal mirror surfaces. In the conventional method, varifocal mirror generates an approximate spherical surface or a paraboloid-like surface by applying a distributed load to the central part of the mirror with parallel plate electrodes. In this study, the micromirror is deformed only by applying a bending moment to the circumference of the mirror in order to generate an ideal paraiboloid. The proposed mirror was fabricated from SOI wafer. The deviation of the varifocal mirror from the ideal parabolid was measured to smallar than 5nm for the 400μm diameter mirror with the focal lengths from the infinity to 24mm at the voltages from 0 to 215V.",
keywords = "Bending moment, Micromirror, Paraboloid, Varifocus",
author = "Ryohei Hokari and Kazuhiro Hane",
year = "2008",
month = oct,
day = "23",
doi = "10.1109/OMEMS.2008.4607844",
language = "English",
isbn = "9781424419180",
series = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS",
pages = "92--93",
booktitle = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS",
note = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS ; Conference date: 11-08-2008 Through 14-08-2008",
}