A two-degree-of-freedom linear encoder for measurement of position and straightness

Akihide Kimura, Yoshikazu Arai, I Ko

研究成果: Conference contribution

5 被引用数 (Scopus)

抄録

A new displacement sensor, the two-DOF linear encoder, is proposed to measure not only the X-directional position but also the Z-directional straightness of a linear stage. The prototype of the two-DOF linear encoder is developed experiments are carried out to evaluate basic performances of the sensor. The working distance is approximately 5 mm. Interpolation error is about ±1 %, which is equal to approximately ±16 nm and ±3 nm as X- and Z-displacements respectively. Resolution is under 0.5 nm in the X- and Z- directions. Future work is measuring of the X-directional position and the Z-directional straightness of the precision linear stage.

本文言語English
ホスト出版物のタイトルProceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE
出版ステータスPublished - 2008 12 1
イベント23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE - Portland, OR, United States
継続期間: 2008 10 192008 10 24

出版物シリーズ

名前Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE

Other

Other23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE
CountryUnited States
CityPortland, OR
Period08/10/1908/10/24

ASJC Scopus subject areas

  • Mechanical Engineering

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