A Three-axis Displacement Sensor with Nanometric Resolution

W. Gao, A. Kimura

研究成果: Article査読

78 被引用数 (Scopus)

抄録

Instead of plane mirrors in a conventional Michelson interferometer for measurement of Z-directional displacement, the three-axis displacement sensor described in this paper employs two sinusoidal XY-grid mirrors with identical pitches (10 μm) and amplitudes (60 nm) of X- and Y-directional sine waves as the stationary reference mirror and the moving scale mirror, respectively. The positive and negative first-order diffraction light beams from the two XY-grids superimposing with each other to generate interference signals, from which the displacements of the scale grid along the X-, Y-, and Z-axes can be simultaneously obtained. Experimental results have verified that the sensor has nanometric resolutions in all the three axes.

本文言語English
ページ(範囲)529-532
ページ数4
ジャーナルCIRP Annals - Manufacturing Technology
56
1
DOI
出版ステータスPublished - 2007

ASJC Scopus subject areas

  • 機械工学
  • 産業および生産工学

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