A three-axis displacement sensor based on interference of diffracted beams

Akihide Kimura, Yoshikazu Arai, Wei Gao

研究成果: Article査読

抄録

This paper describes a three-axis displacement sensor, which can detect displacements in the XYZ-directions simultaneously. In this sensor, positive and negative first-order diffracted beams from a scale two-axis grid and a reference two-axis grid interfere with each other. Displacement in each direction can be calculated from the interference signals. A prototype sensor is developed based on the proposed principle and basic performances of the sensor are evaluated. The interpolation errors of sensor outputs are within ± 1 %. The nonlinear error components in the short range along the XYZ directions are ±100nm, ±100nm, ±5 nm respectively. 5 nm step motions can be detected in all the three axes.

本文言語English
ページ(範囲)976-980
ページ数5
ジャーナルSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
74
9
DOI
出版ステータスPublished - 2008 9
外部発表はい

ASJC Scopus subject areas

  • Mechanical Engineering

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