This paper describes a three-axis displacement sensor, which can detect displacements in the XYZ-directions simultaneously. In this sensor, positive and negative first-order diffracted beams from a scale two-axis grid and a reference two-axis grid interfere with each other. Displacement in each direction can be calculated from the interference signals. A prototype sensor is developed based on the proposed principle and basic performances of the sensor are evaluated. The interpolation errors of sensor outputs are within ± 1 %. The nonlinear error components in the short range along the XYZ directions are ±100nm, ±100nm, ±5 nm respectively. 5 nm step motions can be detected in all the three axes.
|ジャーナル||Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering|
|出版ステータス||Published - 2008 9|
ASJC Scopus subject areas
- Mechanical Engineering