A thin-film bulk acoustic resonator and filter with optimal edge shapes for mass production

Motoaki Hara, Masanori Ueda, Yoshio Satoh

    研究成果: Article査読

    6 被引用数 (Scopus)

    抄録

    The manufacturing conditions of a thin-film bulk acoustic resonator (FBAR) filter were investigated to obtain a high Q factor which is stable for mass production. The FBAR consist of patterned electrodes and piezoelectric films. In this study, the influence of edge shape of the films on the anti-resonance characteristics was investigated using a numerical method. Optimized shape was applied to a 2.5-GHz band resonator and filter. As a result, significant improvement of the Q factor and the insertion loss was confirmed.

    本文言語English
    ページ(範囲)90-96
    ページ数7
    ジャーナルUltrasonics
    53
    1
    DOI
    出版ステータスPublished - 2013 1月

    ASJC Scopus subject areas

    • 音響学および超音波学

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