For the pancake CVD reactor, a mathematical model for global analysis of heat transfer in the reactor was developed, and the effects of the geometry and location of the RF coil and the frequency of the RF current on the temperature distributions in the reactor, especially on the susceptor, were investigated. It is found that the heat generation rate in the susceptor is strongly affected by the location of the RF coil and the current frequency, and that the temperature variation on the susceptor is large with the plane RF coil. Also, by modifying the geometry of the RF coil, the temperature distributions on the susceptor can be easily improved.
ASJC Scopus subject areas
- Chemical Engineering(all)