A spiral scanning-type AFM for high-speed and large-area measurement

Yuguo Cui, Gaofa He, Yoshikazu Arai, Takemi Asai, I Ko

研究成果: Conference contribution

抄録

This paper presents a spiral scanning-type AFM for high-speed and large-area measurement. The AFM is composed of an air-bearing linear stage and an air-bearing spindle for fast XY scanning. An AFM probe-unit for the Z-direction measurement is mounted on the linear stage. The spiral XY scanning is conducted by synchronizing the motions of the linear stage and the spindle. The mechanical bandwidth of the Zdirectional AFM probe-unit in constant height mode is confirmed to be over 40 kHz. It takes approximately 40 seconds for measurement of an area with a diameter of 4 mm. Influence of the bandwidth of the electronics of the AFM cantilever sensor on the measurement speed is investigated.

本文言語English
ホスト出版物のタイトルProceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
編集者Hendrik Van Brussel, E. Brinksmeier, H. Spaan, T. Burke
出版社euspen
ページ384-388
ページ数5
ISBN(電子版)9780955308253
出版ステータスPublished - 2008 1 1
イベント10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008 - Zurich, Switzerland
継続期間: 2008 5 182008 5 22

出版物シリーズ

名前Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
2

Other

Other10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
国/地域Switzerland
CityZurich
Period08/5/1808/5/22

ASJC Scopus subject areas

  • 器械工学
  • 機械工学
  • 材料科学(全般)
  • 環境工学
  • 産業および生産工学

フィンガープリント

「A spiral scanning-type AFM for high-speed and large-area measurement」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル