TY - JOUR
T1 - A solidly mounted, high frequency, thickness shear mode bulk acoustic wave resonator using X-LiTaO3thin plate and SiO2/Ta multilayer acoustic films
AU - Kadota, Michio
AU - Ishii, Yoshimi
AU - Tanaka, Shuji
N1 - Publisher Copyright:
© 2021 The Japan Society of Applied Physics.
PY - 2021/7
Y1 - 2021/7
N2 - This paper describes a bulk acoustic wave (BAW) high-frequency resonator with a solidly mounted structure using a single crystal LiTaO3 (LT) thin plate. A Bragg reflector solidly supports the LT thin plate, which is fragile if self-suspended. The BAW resonator uses a thickness shear mode in 1.5 μm thick X-LT. The Bragg reflector is made of four pairs of SiO2 and Ta films, i.e. eight layers in total. The fabricated device works at a resonance frequency of 1.14 GHz and an antiresonance frequency of 1.23 GHz, showing a bandwidth of 7.9% and a low-Temperature coefficient of frequency of-16 ppm °C-1 and-26 ppm °C-1 at the maximum and minimum admittances, respectively. The measured impedance ratio is 61 dB, although the structure and fabrication process are not optimized yet, suggesting a high potential for this device.
AB - This paper describes a bulk acoustic wave (BAW) high-frequency resonator with a solidly mounted structure using a single crystal LiTaO3 (LT) thin plate. A Bragg reflector solidly supports the LT thin plate, which is fragile if self-suspended. The BAW resonator uses a thickness shear mode in 1.5 μm thick X-LT. The Bragg reflector is made of four pairs of SiO2 and Ta films, i.e. eight layers in total. The fabricated device works at a resonance frequency of 1.14 GHz and an antiresonance frequency of 1.23 GHz, showing a bandwidth of 7.9% and a low-Temperature coefficient of frequency of-16 ppm °C-1 and-26 ppm °C-1 at the maximum and minimum admittances, respectively. The measured impedance ratio is 61 dB, although the structure and fabrication process are not optimized yet, suggesting a high potential for this device.
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U2 - 10.35848/1347-4065/abef11
DO - 10.35848/1347-4065/abef11
M3 - Article
AN - SCOPUS:85105715574
VL - 60
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
M1 - SDDC11
ER -