A probe-positioning method with two-dimensional calibration pattern for micro-multi-point probes

Wataru Yashiro, Ichiro Shiraki, Kazushi Miki

研究成果: Article査読

8 被引用数 (Scopus)

抄録

A probe-positioning pattern for a multiprobe atomic force microscope (AFM) was fabricated using electron-beam lithography. The probe positioning method can be independently driven without an extra probe monitoring system; each AFM probe monitors its own position by reading the address information on the pattern. A similar addressing concept for determining x-axis and y-axis locations of a microscope probe relative to a probe tip locator was also proposed.

本文言語English
ページ(範囲)2722-2725
ページ数4
ジャーナルReview of Scientific Instruments
74
5
DOI
出版ステータスPublished - 2003 5月
外部発表はい

ASJC Scopus subject areas

  • 器械工学

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