A physics-based imaging model of scanning electron microscopes

Kousuke Kamada, Takayuki Okatani, Koichiro Deguchi

研究成果: Conference contribution

抄録

This paper discusses a physics-based imaging model of scanning electron microscopes (SEM). The purpose is to accurately examine the imaging process of a SEM, which has to be necessary to realize novel applications of the SEM images, such as 3D shape reconstruction from image brightness. Its brightness is determined by the total energy of the secondary electrons derived by the incidence of accelerated electron beam to a surface point and then captured by the SEM detector. There are several simple imaging models. But, they are pointed out that the actual brightness cannot be dealt with. We then develop a better imaging model that precisely describes the physical process of the emergence of the secondary electron, their reflections and detections.

本文言語English
ホスト出版物のタイトルProceedings of IAPR Conference on Machine Vision Applications, MVA 2007
ページ102-105
ページ数4
出版ステータスPublished - 2007 12 1
イベント10th IAPR Conference on Machine Vision Applications, MVA 2007 - Tokyo, Japan
継続期間: 2007 5 162007 5 18

出版物シリーズ

名前Proceedings of IAPR Conference on Machine Vision Applications, MVA 2007

Other

Other10th IAPR Conference on Machine Vision Applications, MVA 2007
国/地域Japan
CityTokyo
Period07/5/1607/5/18

ASJC Scopus subject areas

  • コンピュータ ビジョンおよびパターン認識

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