A Phase Retrieval Method for Noncrystalline Layers on Crystal Surfaces

Wataru Yashiro, Kazushi Sumitani, Yoshitaka Yoda, Toshio Takahashi

研究成果: Article査読

4 被引用数 (Scopus)

抄録

A phase retrieval method for noncrystalline surface layers that involves intensity modulation of the specular reflection under the excitation of a Bragg reflection was applied to a Si(001) single crystal covered with a native oxide layer of a few nanometers thickness. The phases and moduli of the amplitudes of the scatterings from the native oxide layer were uniquely retrieved at three points on the specular truncation rod. The phases and moduli obtained experimentally were consistently explained by a model of a Si(001) single crystal covered with a uniform oxide layer with a rough surface.

本文言語English
ページ(範囲)6658-6662
ページ数5
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
42
10
DOI
出版ステータスPublished - 2003 10
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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