A Partially Etched Structure of Light-Addressable Potentiometric Sensor for High-Spatial-Resolution and High-Speed Chemical Imaging

研究成果: Article査読

4 被引用数 (Scopus)

抄録

In this study, a partially etched structure of a light-addressable potentiometric sensor (LAPS) is fabricated for high-spatial-resolution and high-speed imaging of chemical species. An anisotropic etching process based on tetramethylammonium hydroxide (TMAH) is optimized to fabricate the structure, which strikes a balance between the imaging performance and the mechanical strength of the sensor plate. The etched region of the sensor plate with a thickness of 47 µm yields a 12-fold enhancement of the photocurrent signal at a high frequency of 120 kHz and a 10-fold frequency bandwidth in comparison with the frame region with a thickness of 150 µm due to the reduced traveling distance of charge carriers inside the semiconductor. This result represents a new approach for high signal-to-noise ratio, high-spatial-resolution, and high-speed measurement.

本文言語English
論文番号1700964
ジャーナルPhysica Status Solidi (A) Applications and Materials Science
215
15
DOI
出版ステータスPublished - 2018 8 8

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜
  • 電子工学および電気工学
  • 材料化学

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