A Novel three Degree-of-Freedom Resonator with High Stiffness Sensitivity Utilizing Mode Localization

研究成果: Conference contribution

抄録

This paper reports a novel three degree of freedom (DoF) resonator whose mechanical system is the combination of a normal dual mass resonator (DMR) and an amplified dual mass resonator (ADMR). Stiffness perturbation between two outer masses causes mode coupling between DMR mode and ADMR modes which can be treated as anti-phase modes of DMR and ADMR, respectively. The amplitude ratio of two masses, which came from the mode localization, is highly sensitive to the stiffness perturbation. Mode localization in this novel design was validated both by the theoretical and the experimental studies. From the theoretical consideration, the sensitivity could be tuned by adjusting the stiffnesses. The measurement results showed the as-fabricated sensitivity was 209.6. The sensitivity could be enhanced to be 56679 by applying the DC bias of 39.3V to electrostatically soften the inner springs, which is consistent with the theoretical result.

本文言語English
ホスト出版物のタイトル34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
出版社Institute of Electrical and Electronics Engineers Inc.
ページ810-813
ページ数4
ISBN(電子版)9781665419123
DOI
出版ステータスPublished - 2021 1 25
イベント34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, United States
継続期間: 2021 1 252021 1 29

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2021-January
ISSN(印刷版)1084-6999

Conference

Conference34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
国/地域United States
CityVirtual, Gainesville
Period21/1/2521/1/29

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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