TY - GEN
T1 - A novel sensorless control of a two-axis planar motion stage for precision positioning
AU - Dian, Song Yi
AU - Dong, Hang
AU - Gao, Wei
N1 - Copyright:
Copyright 2011 Elsevier B.V., All rights reserved.
PY - 2011
Y1 - 2011
N2 - In this study, a novel sensorless control to yield sub-micron precision positioning performance and low cost has been introduced to a Sawyer motor-based two-axis planar motion stage. The experiment results have verified the effectiveness of the suggested strategy for the stage.
AB - In this study, a novel sensorless control to yield sub-micron precision positioning performance and low cost has been introduced to a Sawyer motor-based two-axis planar motion stage. The experiment results have verified the effectiveness of the suggested strategy for the stage.
KW - Planar motion stage
KW - Precision positioning
KW - Sensorless control
KW - Sliding mode observer
UR - http://www.scopus.com/inward/record.url?scp=79952506874&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79952506874&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMR.189-193.4121
DO - 10.4028/www.scientific.net/AMR.189-193.4121
M3 - Conference contribution
AN - SCOPUS:79952506874
SN - 9783037850312
T3 - Advanced Materials Research
SP - 4121
EP - 4125
BT - Manufacturing Process Technology
T2 - 2nd International Conference on Manufacturing Science and Engineering, ICMSE 2011
Y2 - 9 April 2011 through 11 April 2011
ER -