A novel control method using nonlinear observer for a XYθz planar actuator

Y. Arai, S. Y. Dian, W. Gao

研究成果: Article査読

1 被引用数 (Scopus)


In this study, a novel control law including a fine-tuned PID component to yield basic dynamic performance, and a component derived from the Sliding Mode Observer (SMO) to estimate and then compensate for modeling uncertainties and disturbances, has been introduced to planar actuator of an ultra-precision positioning stage. Experimental results are presented to verify the effectiveness of suggested dynamic compensation strategy and tracking performance of the non-contact planar actuator.

ジャーナルKey Engineering Materials
出版ステータスPublished - 2008 1 1

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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