A new method of position detection using an optical scanning angle sensor

Satoshi Kiyono, Wei Gao, Masaya Kanai, Tadashi Hoshino, Yuki Shimizu

研究成果: Article査読

1 被引用数 (Scopus)


A new position detecting method, which uses a 2-D angle grid and a 2-D angle sensor, is proposed. The angle grid has a 2-D sinusoidal angular pattern on the surface. The relative displacements between the angle grid and the angle sensor in the X- and Y-directtons can be detected from the output of the angle sensor. Because of the angle independency in the X- and Y- directions, it is possible to detect the X- and Y-directional positions from the 2-D angle sensor outputs. Furthermore, use of an optical scanning angle sensor, which scans a beam spot on the angle grid, can reduce the effect of the form error of the angle grid. Rolling and pitching can also be detected by using this method. In this paper, a scanning 2-D angle sensor is designed and manufactured. Experimental results of position detection are reported.

ジャーナルSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
出版ステータスPublished - 2001

ASJC Scopus subject areas

  • 機械工学


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