A Monte Carlo simulation on the process of cluster deposition

K. Hongo, H. Mizuseki, Y. Kawazoe

研究成果: Article査読

5 被引用数 (Scopus)

抄録

Cluster deposition process is expected to open a new scheme for thin-film formation process, which realizes better physico-chemical properties than by conventional processes. We simulate the variants of morphologies of thin films fabricated by the cluster deposition, since it is important to investigate the properties of the thin film. In this paper, a Monte Carlo method is applied to describe the motion of clusters and monomers. The present numerical simulation is performed on a three-dimensional lattice. Some growth morphologies are obtained, and the relationship between the resultant morphologies and the parameters used in the simulation such as deposition rate and size of the clusters are examined.

本文言語English
ページ(範囲)439-442
ページ数4
ジャーナルMaterials Transactions
42
3
DOI
出版ステータスPublished - 2001

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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