A miniaturized biconvex quartz-crystal microbalance with large-radius spherical thickness distribution

Li Li, Masayoshi Esashi, Takashi Abe

研究成果: Article査読

25 被引用数 (Scopus)

抄録

The fabrication of a miniaturized biconvex quartz-crystal microbalance (QCM) with large-radius spherical thickness distribution using reactive ion etching and photoresist reflow with solvent vapor technology was presented. It was shown that the method could not only help achieve large-radius spherical convex shape, but also in miniaturization and batch fabrication processes. It was demonstrated that the Q factor of the fabricated QCM is two times higher than that of the planar QCM, while the spurious mode around the fundamental vibration mode is also suppressed. The QCM was also found to possess superior resonant characteristics under the viscoelastic liquid.

本文言語English
ページ(範囲)2652-2654
ページ数3
ジャーナルApplied Physics Letters
85
13
DOI
出版ステータスPublished - 2004 9月 27

ASJC Scopus subject areas

  • 物理学および天文学(その他)

フィンガープリント

「A miniaturized biconvex quartz-crystal microbalance with large-radius spherical thickness distribution」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル