A microwave probe nanostructure for atomic force microscopy

Y. Ju, M. Hamada, T. Kobayashi, H. Soyama

研究成果: Article査読

15 被引用数 (Scopus)

抄録

An atomic force microscope (AFM) probe on a GaAs wafer was studied as a new microwave probe structure. A waveguide was created by evaporating an Au film on the top and bottom surfaces of the GaAs AFM probe. The fabricated AMF probe's tip is 8 μm long and has a radius of curvature of about 50 nm. The open structure of the waveguide at the tip of the probe was generated by using focused ion beam (FIB) fabrication. AFM topography of a grating sample was created by using the fabricated microwave AFM probe. The fabricated probe exhibits nanometer-scale resolution, and microwave emission was successfully detected at the tip of the probe by approaching Cr-V steel and Au wire samples.

本文言語English
ページ(範囲)1195-1199
ページ数5
ジャーナルMicrosystem Technologies
15
8
DOI
出版ステータスPublished - 2009 8

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学

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