A micro-structured Si-based electrodes for high capacity electrical double layer capacitors

Valdas Krikscikas, Hiroyuki Oguchi, Hiroshi Yanazawa, Motoaki Hara, Hiroki Kuwano

    研究成果: Conference article査読

    抄録

    We challenged to make basis for Si electrodes of electric double layer capacitors (EDLC) used as a power source of micro-sensor nodes. Mcroelectromechanical systems (MEMS) processes were successfully introduced to fabricate micro-structured Si-based electrodes to obtain high surface area which leads to high capacity of EDLCs. Study of fundamental properties revealed that the microstructured electrodes benefit from good wettability to electrolytes, but suffer from electric resistance. We found that this problem can be solved by metal-coating of the electrode surface. Finally we build an EDLC consisting of Au-coated micro-structured Si electrodes. This EDLC showed capacity of 14.3 mF/cm2, which is about 530 times larger than that of an EDLC consisting of flat Au electrodes.

    本文言語English
    論文番号012045
    ジャーナルJournal of Physics: Conference Series
    557
    1
    DOI
    出版ステータスPublished - 2014
    イベント14th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications, PowerMEMS 2014 - Awaji Island, Hyogo, Japan
    継続期間: 2014 11月 182014 11月 21

    ASJC Scopus subject areas

    • 物理学および天文学(全般)

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