A method for calibrating the line-focus-beam acoustic microscopy system

Jun Ichi Kushibiki, Mototaka Arakawa

研究成果: Article査読

51 被引用数 (Scopus)

抄録

Absolute accuracy of the line-focus-beam (LFB) acoustic microscopy system is investigated for measurements of the leaky surface acoustic wave (LSAW) velocity and attenuation, and a method of system calibration is proposed. In order to discuss the accuracy, it is necessary to introduce a standard specimen whose bulk acoustic properties, (e.g., the independent elastic constants and density) are measured with hig;h accuracy. Single crystal substrates of gadolinium gallium garnet (GGG) are taken as standard specimens. The LSAW propagation characteristics are measured and compared with the calculated results using the measured bulk acoustic properties. Calibration is demonstrated for the system using two LFB acoustic lens devices with a cylindrical concave surface of 1-mm radius in the frequency range 100 to 300 MHz.

本文言語English
ページ(範囲)421-430
ページ数10
ジャーナルIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
45
2
DOI
出版ステータスPublished - 1998 1 1

ASJC Scopus subject areas

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

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