A linear-rotary stage for precision positioning

I Ko, Shinji Sato, Yoshikazu Arai

研究成果: Article査読

38 被引用数 (Scopus)

抄録

This paper presents a linear-rotary (Z-θZ) stage that can generate motions along and about the Z-axis based on friction drive. The moving element, which is a steel cylinder, is supported and actuated by two driving units, each consisting of two PZTs and a friction component made by permanent magnet. The magnetic force is employed for holding the moving element and stabilizing the driving condition. The moving ranges and maximum speeds of the stage are 12 mm, 16 mm/s in the Z-direction and 360°, 10.5 rpm in the θZ-direction, respectively. A Z-θZ sensor is also constructed for servo control of the stage.

本文言語English
ページ(範囲)301-306
ページ数6
ジャーナルPrecision Engineering
34
2
DOI
出版ステータスPublished - 2010 4 1

ASJC Scopus subject areas

  • Engineering(all)

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