A hydrogen sensor based on Mg-Pd alloy thin film

K. Yoshimura, S. Nakano, S. Uchinashi, Shinichi Yamaura, H. Kimura, A. Inoue

    研究成果: Article査読

    26 被引用数 (Scopus)

    抄録

    We report on the hydrogen sensing property of Pd-capped Mg-Pd alloy thin films which were prepared by dc magnetron sputtering. Pd-capped Mg 0.9 Pd 0.1 films of thicknesses 10 nm Pd and 40 nm Mg-Pd show a good hydrogen sensing property for hydrogen-containing atmosphere at room temperature. Their sensing range is from 40 ppm to 4% hydrogen in Ar. These films are supposed to be candidates for a low-cost room temperature hydrogen sensor.

    本文言語English
    ページ(範囲)3335-3338
    ページ数4
    ジャーナルMeasurement Science and Technology
    18
    11
    DOI
    出版ステータスPublished - 2007 11 1

    ASJC Scopus subject areas

    • Instrumentation
    • Engineering (miscellaneous)
    • Applied Mathematics

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