A hybrid nano-probe for precision nanofabrication of complex surfaces

W. Gao, S. Genda, Y. Kudo, S. Kiyono, J. Patten

研究成果: Conference contribution

抄録

This paper describes an intelligent nano-probe for precision nanofabrication of complex surfaces. The probe is a hybrid of a fast controlled diamond cutting unit (FTC-unit) and a highly-sensitive piezoelectric force sensor. The FTC-unit consists of a diamond cutting tool and a PZT actuator. Complex surfaces can be generated through fast controlling the position of the tool, which corresponds to the depth of cut into the surface, by the PZT actuator. The cutting force is detected by the force sensor coupled into the FTC-unit. The information of the cutting force is employed not only for monitoring the complex fabricating process but also for obtaining the fabricated surface profile, which are important for the purpose of precision nanofabrication of complex surfaces. Two structures of coupling the force sensor to the FTC-unit are designed and compared.

本文言語English
ホスト出版物のタイトル2004 8th International Conference on Control, Automation, Robotics and Vision (ICARCV)
ページ173-177
ページ数5
出版ステータスPublished - 2004 12 1
イベント8th International Conference on Control, Automation, Robotics and Vision (ICARCV) - Kunming, China
継続期間: 2004 12 62004 12 9

出版物シリーズ

名前2004 8th International Conference on Control, Automation, Robotics and Vision (ICARCV)
1

Other

Other8th International Conference on Control, Automation, Robotics and Vision (ICARCV)
CountryChina
CityKunming
Period04/12/604/12/9

ASJC Scopus subject areas

  • Engineering(all)

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