A high sensitivity compact gas concentration sensor using UV light and charge amplifier circuit

Hidekazu Ishii, Masaaki Nagase, Nobukazu Ikeda, Yoshinobu Shiba, Yasuyuki Shirai, Rihito Kuroda, Shigetoshi Sugawa

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

A high sensitivity compact gas concentration sensor based on the ultraviolet (UV) light absorption spectrophotometry employing charge amplifier circuit is developed in this work as inline gas concentration monitoring system for electronic device manufacturing lines. The developed sensor was verified to be useful for concentration monitoring of metal organic (MO) gases including Bis(cyclopentadienyl)magnesium(Cp2Mg) with a high accuracy and a high reproducibility for 10ppm to 0.036% concentration range, where there was no in-line gas concentration sensor sufficiently applicable to this gas before.

本文言語English
ホスト出版物のタイトルIEEE Sensors, SENSORS 2016 - Proceedings
出版社Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)9781479982875
DOI
出版ステータスPublished - 2017 1 5
イベント15th IEEE Sensors Conference, SENSORS 2016 - Orlando, United States
継続期間: 2016 10 302016 11 2

Other

Other15th IEEE Sensors Conference, SENSORS 2016
国/地域United States
CityOrlando
Period16/10/3016/11/2

ASJC Scopus subject areas

  • 電子工学および電気工学

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