A high-Q resonance-mode measurement of EIS capacitive sensor by elimination of series resistance

Ko ichiro Miyamoto, Kosuke Hayashi, Azuma Sakamoto, Carl Frederik Werner, Torsten Wagner, Michael J. Schöning, Tatsuo Yoshinobu

研究成果: Article査読

6 被引用数 (Scopus)

抄録

An EIS capacitive sensor is a semiconductor-based potentiometric sensor, which is sensitive to the ion concentration or pH value of the solution in contact with the sensing surface. To detect a small change in the ion concentration or pH, a small capacitance change must be detected. Recently, a resonance-mode measurement was proposed, in which an inductor was connected to the EIS capacitive sensor and the resonant frequency was correlated with the pH value. In this study, the Q factor of the resonant circuit was enhanced by canceling the internal resistance of the reference electrode and the internal resistance of the inductor coil with the help of a bypass capacitor and a negative impedance converter, respectively. 1% variation of the signal in the developed system corresponded to a pH change of 3.93 mpH, which was about 1/12 of the conventional method, suggesting a better performance in detection of a small pH change.

本文言語English
ページ(範囲)1006-1010
ページ数5
ジャーナルSensors and Actuators, B: Chemical
248
DOI
出版ステータスPublished - 2017 1 1

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学
  • 材料化学

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