A glass tube micro-stylus probe for surface form metrology

研究成果: Conference contribution

3 引用 (Scopus)

抜粋

This paper presents a micro-stylus probe, which is composed of a precision glass micro-ball and a shaft made by a glass tube. The diameter of the micro-ball was 50 μm. The tip angle of the glass-tube shaft was approximately 10 degrees. Strength test shows that the tolerance of glass tube micro-stylus against external forces is 90 mN. To reduce the stick-slip phenomena, a micro-tapping probe employing the glass tube micro-stylus and a PZT actuator was demonstrated. The micro-stylus probe was mounted to an air-bearing displacement sensor for scanning surface form metrology. Experimental results showed that the micro-tapping probe was effective for reducing the influence of the stick-slip phenomena.

元の言語English
ホスト出版物のタイトルSeventh International Symposium on Precision Engineering Measurements and Instrumentation
8321
DOI
出版物ステータスPublished - 2011 12 1
イベント7th International Symposium on Precision Engineering Measurements and Instrumentation - Lijiang, China
継続期間: 2011 8 72011 8 11

Other

Other7th International Symposium on Precision Engineering Measurements and Instrumentation
China
Lijiang
期間11/8/711/8/11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • これを引用

    Xu, B., Shimizu, Y., & Ko, I. (2011). A glass tube micro-stylus probe for surface form metrology. : Seventh International Symposium on Precision Engineering Measurements and Instrumentation (巻 8321). [83211Z] https://doi.org/10.1117/12.904875